SEREN R301 Instrukcja Operatora

SEREN INDUSTRIAL POWER SYSTEMS INC. RX01/LX01 SERIES RADIO FREQUENCY POWER SUPPLY OPERATOR’S MANUAL Revision: 1.09 Standard Configuration

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Never push objects of any kind into the slots and openings of the RF Power Supply’s enclosure. The

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION the RF output’s frequency. The

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION 25 SETRET Setpoint Return. Anal

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL INTERFACE CIRCUITS Figures 1 through 5 illustrate the typical circuits used in the RF Power

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TTL-Compatible Input Circuits All TTL-Compatible logic input circuits are internally pulled up to

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL FEEDBACK Input Circuit High-impedance, high Common-Mode Rejection Ratio, analog input. Input volta

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 9. Serial Interface Connector The serial interface provides remote control and monitoring of the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Interface Wiring Seren IPS strongly recommends the use of shielded cable when making serial

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 10. Equipotential Bonding Terminal Model Type Stud Type R/L101, R/L301, R/L101MKII, R/L301MKII

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 11. Valve Connector (Water Cooled Models Only) Connect the external solenoid water valve to the VA

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 12. Coolant Water IN Port (Water Cooled Models Only) Fitting Type: 3/8” N.P.T. (tapered) dry-seal,

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Radio Frequency Power Supply Features Seren IPS Inc. RF Power Supplies are intended for use with r

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TYPICAL ANALOG INTERFACE CONNECTIONS Analog Control There are many possible analog interface wiri

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL External Feedback with Probe Inverter Option The RF power supply’s external feedback input (FEEDBAC

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROBE SIGNALTO SYSTEM(IF DESIRED)SHIELDSHELLCHASSIS12MATCHING TRANSFORMER)(MATCHING NETWORK ORPR

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Typical System Configuration A basic plasma processing system configuration is diagrammed below. O

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Maintenance Seren IPS Inc R/LX01 Series Radio Frequency Power Supplies are designed to be maintena

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Problem Solving Problem Solving Chart Front Panel Alarm Messages The following chart lists common

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution Page 108 Seren IPS Inc. 6100220000 Rev. 1.09 Ensure the Analog Interf

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution display The Maximum Power Limit threshold is set too low for the cur

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Condition Suggested Solution parameters to better suit the process (refer to the Programmable Para

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Technical Data Specifications and other technical data are listed by model type, and where applica

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Installation: Recommended mounting: Seren IPS Inc. RF Power Supplies are designed for placement on

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply (P/N 9600600002/9600600003) AC Mains Input Power Vol

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply (P/N 9600600002/9600600003) Protection: Forward po

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Transformer Power Supply (P/N 9600600002/9600600003) Power Monitor Scaling: Fo

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply (P/N 9600600004/9600600005) AC Mains Input Power Volta

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply (P/N 9600600004/9600600005) Protection: Forward powe

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101 Specifications Switching Power Supply (P/N 9600600004/9600600005) Power Monitor Scaling: Forw

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications AC Mains Input Power 90-140VAC or 190-264VAC (universal input), Single Pha

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications Protection: Forward power limits on current, transistor power dissipatio

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R101MKII Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly pr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications AC Mains Input Power Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, fac

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Connection To A Water Cooling System: (Water-cooled RF Power Supplies only) Water-cooled RF Pow

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications Protection: Forward power limits on current, transistor power dissipation, a

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301 Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly propor

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications AC Mains Input Power 90-140VAC or 190-264VAC (universal input), Single Pha

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications Protection: Forward power limits on current, transistor power dissipatio

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R301MKII Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly pr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications AC Mains Input Power Voltage Taps: 98V, 115V, 208V, or 220V; Single-phase, fac

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications -50dBc 585 mBar minimum (approx 4000m above sea level) Protection: Forwa

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301 Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly propor

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications 90-140VAC or 190-264VAC (universal input), Single Phase. There are no tran

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications Protection: Forward power limits on current, transistor power dissipatio

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Water Fitting Removal Method Step Action 1. Disable coolant water flower and drain the system or

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L301MKII Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly pr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications Voltage: 90-125V or 190-264V (universal input), Single Phase. There are no tr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications Spurious Radiation: Output scaling is 5.0VDC at 600 Watts (8.33mV/Watt) or

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R601 Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications Voltage: 90-125V or 190-264V (universal input), Single Phase. There are no tr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications Protection: Forward power limits on current, transistor power dissipation, and

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L601 Specifications Power Monitor Scaling: Forward Power Monitor Monitor output is linearly propor

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications Voltage: 190-264V, Single Phase. There are no transformer voltage taps to con

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100%

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001 Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Solenoid Water Valve Installation: The solenoid water valve must be connected to the unit before co

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Voltage: 190-264V, Single Phase. There are no transformer voltage taps to co

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Noise, Hum, and Ripple: -50dBc Pulsing: 0 to 1KHz, 1-Hz Steps; 0 to 100

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Interlocks: External: External interlock provided for disabling RF output

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R1001W Specifications Identification: Seren IPS Inc. part number, serial number, and customer pa

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications Voltage: 190-264V Single Phase. There are no transformer voltage taps to conf

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications Harmonics: Equal to or less than -40dBc at maximum output frequency Noi

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L1001 Specifications Reflected Power Monitor Monitor output is linearly proportional to 0 to 100

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications Voltage: 190-264V, Single Phase or Three Phase (specify at time of order) Th

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications Load Tolerance: No oscillation or failure into a mismatch condition. Prot

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications 3/8” [9.52mm] Inside Diameter (I.D.) or larger. Waste Heat into Coolant Wa

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Connection to AC Mains: BEFORE connecting the RF Power Supply the AC mains, verify the AC Mains vo

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001 Specifications In Power Control mode, analog setpoint sensitivity is 2000 Watts at 5.0VDC (

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) T

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Load Tolerance: No oscillation or failure into a mismatch condition. Pro

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Coolant Water Fittings: Type 3/8” N.P.T. Female threaded pipe External in

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001H Specifications Analog Setpoint Sensitivity: Safety: Dimensions inch (mm): In Power Contro

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Voltage: 190-264V, Single Phase or Three Phase (specify at time of order). T

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Protection: Forward power limits on current, transistor power dissipation,

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Coolant Water Supply Line Inside Diameter: 3/8” [9.52mm] Inside Diameter (I.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001 Specifications Analog Setpoint Sensitivity: In Power Control mode, analog setpoint sensitivit

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Voltage: 190-264V, Single Phase or Three Phase (specify at time of order).

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL System Interfacing: The RF Power Supply can be used “stand-alone” or can be interfaced with a proc

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Protection: Forward power limits on current, transistor power dissipation,

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Coolant Water Supply Line Inside Diameter: 3/8” [9.52mm] Inside Diameter (I

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L2001H Specifications Analog Setpoint Sensitivity: In Power Control mode, analog setpoint sensitivi

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) Th

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Load Tolerance: No oscillation or failure into a mismatch condition. Prot

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Coolant Water Fittings: Type 3/8” N.P.T. Female threaded pipe Coolant Wat

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R3001 Specifications Analog Setpoint Sensitivity: Seren IPS Inc. part number, serial number, and

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Voltage: 190-264V. Single Phase or Three Phase (specify at time of order) Th

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Protection: Equal to or less than -50dBc Operating Temperature Ambient: 0 t

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Coolant Water Supply Line Inside Diameter: 3/8” [9.52mm] Inside Diameter (I.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Front Panel Controls and Display: Buttons (Model L301 Shown, functions are the same for all R/LX

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL L3001 Specifications Analog Setpoint Sensitivity: In Power Control mode, analog setpoint sensitivit

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications Voltage: 190-264V. Three Phase There are no transformer voltage taps to conf

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications Spurious Radiation: Inlet Temperature: +15°C minimum to +40°C maximum temper

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications Waste Heat into Coolant Water 3000 Watts maximum. Note: The waste heat does

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R5001 Specifications In Power Control mode, analog setpoint sensitivity is 5000 Watts at 5.0VDC (1.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 (27MHz) Specifications Voltage: 190-264V. Three Phase There are no transformer voltage ta

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 (27MHz) Specifications Harmonics: -50dBc Noise, Hum, and Ripple: -50dBc Pulsing:

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 (27MHz) Specifications Waste Heat into Coolant Water 7000 Watts (398 BTU/minute) maximum.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 (27MHz) Specifications Analog Setpoint Sensitivity: In Power Control mode, analog setpoint s

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 Specifications Voltage: 190-264V, Three Phase There are no transformer voltage taps to con

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Display The front panel display shows the operational status of the RF Power Supply and provides le

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 Specifications Harmonics: 3/8” [9.52mm] Inside Diameter (I.D.) or larger. -50dBc Noise

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 Specifications Waste Heat into Coolant Water 8000 Watts (455 BTU/minute) maximum. Note: Th

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R10001 Specifications Analog Setpoint Sensitivity: In Power Control mode, analog setpoint sensitivi

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions Models R101, R101MKII, R301, R301MKII, L301, L301MKII Front View, R101, R101MK

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R101, R101MKII, R301, R301MKII, L301, L301MKII 0.00 [0.00]0.89 [22.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R601, L601, R1001, R1001W, L1001 RADIO FREQUENCY POWER SUPPLYR1001POW

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R601, L601, R1001, R1001W, L1001 Rear View, R601, L601, R1001, L1001

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R2001, R2001H, L2001, L2001H, R3001, L3001 Front View, R2001, R2001H, L

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R2001, R2001H, L2001, L2001H, R3001, L3001 Rear View, R2001, R2001H,

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Model R5001 Front View, R5001 0.00 [0.00]1.48 [37.59]7.24 [183.90]8.72 [221.49

Seren IPS Inc. 6100220000 Rev. 1.09

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Operation Front panel operation of the RF Power Supply is simple. This section describes the use

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Model R5001 Rear View, R5001 IO!RF OUTPUTINSIDEHAZARDOUS VOLTAGE!CEX OUTINW

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Models R10001 0.00 [0.00]1.48 [37.59]9.02 [229.11]10.50 [266.70]0.00 [0.00]

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Physical Dimensions: Model R10001 Side View, Model R10001 Rear View, Model R10001 Page 194 Ser

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Agency Compliance Information R101, R101MKII, L101, R301, R301MKII, L301, L301MKII, R601, L601, R

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL R2001, R2001H, L2001, L2001H, R3001, L3001 Declaration of Conformity (CE) In accordance with ISO/

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Semiconductor Equipment and Materials International (SEMI) Compliance SEMI Safety, S2, and S8 com

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SEREN 1 Year Limited Warranty SEREN IPS Inc. products are warranted to the original purchaser agai

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Glossary of Terms A Amperes, a measurement unit of current Alternating Current “Analog” Industry

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Glossary of Terms Non-Volatile Storage Also know as non-volatile memory. Computer memory that ret

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Revision History: Revision Date Revision Description 10/19/03 Preliminary 0.02 10/27/03 Updated

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Page 202 Seren IPS Inc. 6100220000 Rev. 1.09 Notes:

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL increases or decreases its output to maintain the net power delivered to the load. Reflected power

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 5. Press the “DOWN” button (item 2) until line three reads “FWD POWER LEVELING” or “LOAD POWER LEVE

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Basic Analog Interface Operation Refer to the Rear Panel Controls and Connections and the Typical

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Note: the RFON* signal is edge triggered. A transition from a TTL “high” to TTL “low” logic state

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Basic Serial Interface Operation Refer to the Rear Panel Controls and Connections section for seri

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL a. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Commands The underscore character ( _ ) indicates a space, terminators are specified as car

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE TO SEND DESCRIPTION/COMMENT Applies To Assert PANEL control PANEL<c

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Introduction Thank you for acquiring your new SEREN IPS product. Seren Radio Frequency Power Supp

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE TO SEND DESCRIPTION/COMMENT Applies To Page 22 Seren IPS Inc. 610022000

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE TO SEND DESCRIPTION/COMMENT Applies To Frequency feature may use. R-S

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE TO SEND DESCRIPTION/COMMENT Applies To Response: XXXX<cr> Query R

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND REFERENCE TO SEND DESCRIPTION/COMMENT Applies To Query MC2 Tune Capacitor Preset

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Command Details The underscore character ( _ ) indicates a space, terminators are specified

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO commands except “SERIAL<cr>” or “*

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO “eeee” is the Start Pulse Voltage (Start

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Command: DU<cr> Response: <cr&g

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Response: <cr> FX Set Variable Fr

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO digits. LVL? Query Power Leveling Mode

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ii Seren IPS Inc. 6100220000 Rev. 1.09

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO variable frequency tuning, in 10 KHz inc

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Response: <cr> -P Disable the PUL

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO “e” is not implemented, always returns a

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO “e” is not implemented, always returns a

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO ddddd is the maximum power, in Watts XX

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Character # 1: Control Source 2 = Serial

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO WWWWW is forward power output, in 1-Watt

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO RF Power Supply does not use or store th

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL SERIAL COMMAND DETAILS COMMAND COMMAND DETAIL APPLIES TO Where XXXXX is the desired setpoint, in

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Communications: RS-485 Protocol Overview: Using RS-485 serial communications on the Seren

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Safety Notes …………..………………………………………………………………... 1 RF Power Supply Model Feature

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 2. Select the SERIAL COMMUNICATIONS PROTOCOL: Serial control must be selected before attempting to

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL a. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Serial Communications: MODBUS Protocol Overview: MODBUS functions on the RX01/LX01 Series RF Power

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL How To Configure the RF Power Supply for MODBUS Communications: 1. Select SERIAL control mode. N

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL a. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display shows the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL WRITE PACKET WORD DEFINITIONS WORD2: Operating Frequency (applies to Variable Frequency units o

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL WRITE PACKET WORD DEFINITIONS B0: Variable Frequency Tuning B0=0 Variable Frequency Tuning Off

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL WRITE PACKET WORD DEFINITIONS WORD10: Pulse High Time MSB

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL WRITE PACKET WORD DEFINITIONS WORD17: Frequency Tune – Set Coarse Ratio MSB

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL WRITE PACKET WORD DEFINITIONS WORD23: Frequency Tune – Set Minimum Variable Frequency MSB

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Serial Communications: MODBUS Protocol ……………………………………… 44 Overview …………………………………

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL READ PACKET WORD DEFINITIONS WORD2: Operating Frequency (applies to Variable Frequency units on

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Controller READ SLAVE ID The READ SLAVE ID command, 0x11 may be used to obtain a brief status and i

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL READ SLAVE ID WORD DEFINITIONS WORD6: Operating Frequency MSB

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Configuring Programmable Parameters Navigating the Programming Menu TO ENTER the programming mode,

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To (Default: 2.1M

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Pulse Duty Cyc

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To (Default: Rate

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Excessive RF V

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Load and Tune

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER REFERENCE CHART PARAMETER DISPLAY LINE 3 OPTION Applies To Maximum Allowa

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Serial Interface Wiring …………………………………………………………….. 98 Equipotential Bonding Te

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS: Note: All programmable parameters shown. Not all of the programma

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Control Source: Selects the

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Pulse Mode: Enables or

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Pulse Source Selects the pu

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Leveling Source Select:

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO VLT CNTRL -PRB BNC Routes

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO power metering resolution. F

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO power, in 1-Watt increments.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Refer to the Serial Commands

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Front Panel Setpoint Act

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL TABLE OF CONTENTS Specifications: R2001 …………………………………………………………..……. 149 Specifications: R2001H ………

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO When enabled (on), the RF Po

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Reflected Alarm ON/OFF: REF

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO MATCH PRESET ON When the RF

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Note: When the Variable Fre

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO If reflected power is greate

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Frequency Tuning: to match

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL PROGRAMMABLE PARAMETER DETAILS PARAMETER PARAMETER DETAIL APPLIES TO Status flag set to “fault” I

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Rear Panel Controls and Connections Models R101, R101MKII, R301, R301MKII, L301, L301MKII: 465217

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Model R1001W ~MAINS POWER INANALOG INTERFACESERIAL 1SERIAL 2VALVECEX OUTCEX INWATER OUT!!OIPOWERR

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Models R2001, R2001H, L2001, L2001H, R3001, L3001 Model R5001 !RF OUTPUTINWATERWATEROUT!ANALOGV

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Safety Notes POINTEQUIPOTENTIAL BONDING!GROUND=PROTECTIVE= CAUTION=HIGHVOLTAGE=RADIO FREQUENCYENERG

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL Model R10001 131189 6531211027!HAZARDOUS VOLTAGE!INSIDERF OUTPUTWATERINOUT!WATERANALOGVALVE SE

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 1. RF Output Connect a 50-Ohm coaxial cable from the RF Output connector to a 50-Ohm load (50-Ohm r

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 3. Mains Circuit Breaker: Set to the “1” position to enable, set to the “0” position to disable.

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 6. CEX IN Connector Common Exciter input: 3 to 8V Peak-to-Peak sine wave, at specified operating

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL 8. Analog Interface Connector The analog interface connector is located on the rear panel of the R

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION 1 MAINS INTLK 1 R101, L101, R3

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION 4 PWR/VLT* Power or Voltage le

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION The RFENABLED* signal can also in

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION Measure monitor voltage with resp

RX01/LX01 SERIES RF POWER SUPPLY OPERATOR’S MANUAL ANALOG INTERFACE CONNECTOR PIN LIST PIN SIGNAL NAME DESCRIPTION R301MKII L301MKII, R/L601, R/L100